Observation of femtosecond laser ablation process by using the soft X-ray laser interferometer

Yamamoto, Minoru; Hasegawa, Noboru; Terakawa, Kota*; Umeda, Yoshifumi*; Tomita, Takuro*; Ochi, Yoshihiro; Nishikino, Masaharu; Ishino, Masahiko; Imazono, Takashi; Kaihori, Takeshi; et al.

Proceedings of 12th International Symposium on Laser Precision Microfabrication (LPM 2011) (Internet), 4 Pages, 2011/06

Femtosecond lasers have been used for material processing. However, the physical processes responsible for femtosecond laser ablation have not been understood completely. These processes involve melting, vaporization, re-solidification or ablation, which occur in a very short time from pico- to nano-seconds. To understand the physical processes, it is essential to reveal the dynamics of ultrafast surface morphological change after laser irradiation. At JAEA, the laser-driven plasma soft X-ray laser (SXRL) that has extremely high spatial and spectral purity was constructed. It delivers soft X-ray photons at 89.2 eV (13.9 nm) with a photon number of exceeding , which is sufficient to obtain a single shot interferogram. By using this system, the soft X-ray laser interferometer with the lateral resolution of 1.8 m and a depth resolution of 1 nm was developed. We report on demonstration of time-resolved measurement of femtosecond-laser ablation dynamics by using the soft X-ray laser interferometer.